GammaTrack™ + SensVI™
RF matching and measurement for plasma systems.
GammaTrack combines precision actuation, model-guided tuning, and calibrated RF sensing for fast, repeatable matching across changing plasma loads.
300 W–5 kW2 MHz–40.68 MHz
System specifications
- Tuning
- Manual or sub-second automatic matching with model-guided, closed-loop impedance control
- Precision actuation
- High-performance stepper actuation with femtofarad-level capacitance step resolution
- RF measurement
- Real-time voltage, current, phase, power, complex impedance, and VSWR
- Calibration
- Individually calibrated sensing for measurement accuracy and unit-to-unit repeatability
- Interfaces
- FS USB with ASCII CLI or binary protocol standard. Analog/digital I/O, EtherCAT, DeviceNet, and Modbus TCP interfaces can be customized on request.
- System integration
- Configured around power, frequency, topology, pulsing and synchronization, connectors, cooling, and mechanical constraints
- SensVI
- Integrated with GammaTrack or available as a standalone precision V/I probe for real-time power and impedance telemetry, diagnostics, and control
Designed for plasma etch and deposition, chamber clean and abatement, remote plasma sources, R&D tools, and retrofit programs.
MATCH ANALYSIS50 Ω reference
MATCHEDREFLECTIONΓ 0.018 − j0.027
IMPEDANCE51.7 − j2.8 Ω
VSWR1.07
Live impedance trajectory50 Ω reference
Engineering inquiries